Sign Up to like & get
recommendations!
0
Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2017.11.080
Abstract: Abstract An unsolved problem in research of sputtering from metals induced by energetic large cluster ions is that molecular dynamics (MD) simulations often produce sputtering yields much higher than experimental results. Different from the previous…
read more here.
Keywords:
sputtering yields;
molecular dynamics;
large cluster;
sputtering ... See more keywords
Sign Up to like & get
recommendations!
0
Published in 2025 at "Journal of Physics D: Applied Physics"
DOI: 10.1088/1361-6463/adaf32
Abstract: In this article, we present the results of sputtering yield measurements of Kapton, polyether ether ketone (PEEK) and polytetrafluoroethylene (PTFE) due to xenon ion bombardment. We measured these yields using the weight loss technique, for…
read more here.
Keywords:
sputtering yields;
ion bombardment;
kapton peek;
ptfe ... See more keywords