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Published in 2021 at "Micromachines"
DOI: 10.3390/mi12040448
Abstract: Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and sensors. In this work,…
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Keywords:
softening hardening;
spring softening;
hardening squared;
squared daisy ... See more keywords