Impact of negative oxygen ions on the deposition processes of RF-magnetron sputtered SrTiO3 thin films
Sign Up to like & getrecommendations! Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.05.054
Abstract: Abstract This work reports on the deposition of strontium titanate (SrTiO3) thin films by on-axisradio-frequency magnetron sputtering. The on-axis sputter deposited SrTiO3 thin film showed drastic substrate etching due to the production of accelerated energetic… read more here.
Keywords: deposition; srtio3 thin; thin films; negative oxygen ... See more keywords
Influence of Sr deficiency on structural and electrical properties of SrTiO3 thin films grown by metal–organic vapor phase epitaxy
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DOI: 10.1038/s41598-021-87007-2
Abstract: Homoepitaxial growth of SrTiO3 thin films on 0.5 wt% niobium doped SrTiO3 (100) substrates with high structural perfection was developed using liquid-delivery spin metal–organic vapor phase epitaxy (MOVPE). Exploiting the advantage of adjusting the partial… read more here.
Keywords: phase; thin films; organic vapor; metal organic ... See more keywords
Polar phonons in polycrystalline SrTiO3 thin films: The role of the substrate
Sign Up to like & getrecommendations! Published in 2018 at "Ferroelectrics"
DOI: 10.1080/00150193.2018.1499407
Abstract: Abstract Recently we have demonstrated that out-of-plane dielectric properties of polycrystalline SrTiO3 (ST) films depend on the strain/stress induced by the substrates due to thermal expansion misfit. Here, we present a complementary infra-red (IR) spectroscopy… read more here.
Keywords: thin films; polar phonons; polycrystalline srtio3; phonons polycrystalline ... See more keywords