Vertically Stacked Cantilever n-Type Poly-Si Junctionless Nanowire Transistor and Its Series Resistance Limit
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DOI: 10.1109/ted.2017.2780851
Abstract: We had successfully suspended the vertically stacked cantilever (VSC) nanowire by two approaches: 1) inserting a SiN layer as reinforcement to sustain the gate-stack thermal budget and 2) adopting high- ${k}$ metal gate low-temperature process… read more here.
Keywords: stacked cantilever; vertically stacked; nanowire; series resistance ... See more keywords