Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching
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DOI: 10.1016/j.optlaseng.2020.106114
Abstract: Abstract This paper analyzes laser and etching parameters to fabricate open and continuous microchannels and stacks of such microchannels in the bulk of crystalline sapphire (α-Al2O3). The structures are produced using a two-step method consisting… read more here.
Keywords: stacks microchannels; fabrication millimeter; laser pulses; long structures ... See more keywords