Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model.
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DOI: 10.1364/oe.25.010312
Abstract: A profile of an X-axis stage mirror results in a phase error of gratings in Scanning Beam Interference Lithography. Traditional methods of measuring the profile require extra probes and another large stage mirror on Y-axis,… read more here.
Keywords: axis; axis stage; scanning beam; stage mirror ... See more keywords