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Published in 2018 at "Micromachines"
DOI: 10.3390/mi9010039
Abstract: A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in…
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Keywords:
free standing;
characterization free;
electrical characterization;
standing micron ... See more keywords