High-performance solid-state on-chip supercapacitors based on Si nanowires coated with ruthenium oxide via atomic layer deposition
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Power Sources"
DOI: 10.1016/j.jpowsour.2016.11.093
Abstract: Abstract Solid-state on-chip supercapacitors based on ruthenium oxide coated silicon nanowires were fabricated using a process that is compatible with silicon integrated circuit processing. Ordered arrays of silicon nanowires were fabricated using metal-assisted anodic etching… read more here.
Keywords: solid state; state; state chip; chip supercapacitors ... See more keywords