Modular kinematics and statics modeling for precision positioning stage
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DOI: 10.1016/j.mechmachtheory.2016.10.009
Abstract: Abstract Compliant amplifying mechanisms and guiding mechanisms are prevalently adopted in most present piezo-actuated precision positioning stages. By considering the coupled relations among piezoelectric actuator, compliant amplifying mechanism and guiding mechanism, an analytical method towards… read more here.
Keywords: statics modeling; positioning stage; precision positioning; kinematics ... See more keywords