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Published in 2019 at "Advanced Structural and Chemical Imaging"
DOI: 10.1186/s40679-019-0066-0
Abstract: STEM XEDS spectrum images can be drastically denoised by application of the principal component analysis (PCA). This paper looks inside the PCA workflow step by step on an example of a complex semiconductor structure consisting…
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Keywords:
principal component;
xeds spectrum;
spectrum images;
stem xeds ... See more keywords