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Published in 2018 at "ACS applied materials & interfaces"
DOI: 10.1021/acsami.8b11483
Abstract: We report a novel one-step bottom-up fabrication method for multiscale-structured black Si, which is characterized by randomly distributed microscale Si layers covered with sub-100 nm protrusions with submicron boundary grooves. The unique multiscale structure, suggested…
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Keywords:
fabrication;
method;
step bottom;
bottom fabrication ... See more keywords