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Published in 2017 at "Optik"
DOI: 10.1016/j.ijleo.2016.12.010
Abstract: Abstract In this paper, the influence of radial step height of a spiral phaseplate on an optical diffraction structure is described. We consider a general case, when a radial step height is any rational quantity.…
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Keywords:
radial step;
step height;
height spiral;
spiral phaseplate ... See more keywords
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Published in 2025 at "Nanotechnology"
DOI: 10.1088/1361-6528/ade720
Abstract: Wafer-level step height standards with high optical contrast are crucial in order to improve the accuracy of automatic image recognition in integrated circuits inspection instruments. While conventional Si–SiO2 single-layer film step height standards typically employ…
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Keywords:
height standards;
step;
contrast;
step height ... See more keywords
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1
Published in 2021 at "Modern Physics Letters B"
DOI: 10.1142/s0217984921400066
Abstract: In order to improve the measurement accuracy of the step height measuring instrument, a semiconductor process was used to prepare the step height standard for calibrating the instrument. Aiming at the problem of deviation in…
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Keywords:
height standard;
step;
step height;
measurement ... See more keywords
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1
Published in 2019 at "Applied Sciences"
DOI: 10.3390/app9050874
Abstract: Among the various methods used for glass edge sealing, this study uses microwaves to seal glass edges. Through basic experiments, the main process conditions for edge sealing of glass were derived, and the experimental plan…
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Keywords:
process;
glass;
step height;
edge sealing ... See more keywords