Articles with "step plasma" as a keyword



Improving crystallization and electron mobility of indium tin oxide by carbon dioxide and hydrogen dual-step plasma treatment

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Published in 2017 at "Applied Surface Science"

DOI: 10.1016/j.apsusc.2017.07.182

Abstract: Abstract Obtaining high conductivity indium tin oxide (ITO) films simultaneously with a “soft-deposited” (low temperature, low ions bombardment) and cost-efficient deposition process are critical aspect for versatile photo-electronic devices application. Usually, the low-cost “soft-deposited” process… read more here.

Keywords: ito films; mobility; treatment; step ... See more keywords
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One-step plasma nitriding synthesis of NixN/NF (x = 3, 4) for efficient hydrogen evolution

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Published in 2021 at "Applied Surface Science"

DOI: 10.1016/j.apsusc.2021.149972

Abstract: Abstract Development of high active and cost-effective non-noble metal productions was urgent for the hydrogen evolution reaction (HER) electrocatalysts in future clean energy devices. Herein, we reported a simple approach to fabrication of NixN (x=3,… read more here.

Keywords: step plasma; hydrogen evolution; hydrogen; one step ... See more keywords
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Two-Step Plasma Treatment on Sputtered and Electroplated Cu Surfaces for Cu-To-Cu Bonding Application

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Published in 2019 at "Applied Sciences"

DOI: 10.3390/app9173535

Abstract: The technology trends of next generation electronic packaging are moving toward heterogeneous 3D packaging systems. One of the key processes of 3D packaging system is Cu-to-Cu bonding, which is highly dependent on the planarized, activated,… read more here.

Keywords: plasma treatment; sputtered electroplated; two step; step plasma ... See more keywords