Learning enhanced dual-wavelength digital holography for measuring large-height complex step samples.
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DOI: 10.1364/oe.551813
Abstract: Nanometer-to-micron multi-step complex structures are widely used in precision manufacturing. Accurate and rapid measurement of these large-height complex step samples is crucial for product quality control and the development of manufacturing technologies. However, conventional optical… read more here.
Keywords: wavelength digital; step; dual wavelength; step samples ... See more keywords