A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes
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DOI: 10.3390/mi13071052
Abstract: MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in n = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise… read more here.
Keywords: frequency; stiffness decoupling; mems gyroscopes; mass stiffness ... See more keywords