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Published in 2021 at "Measurement"
DOI: 10.1016/j.measurement.2021.109626
Abstract: Abstract Geometric errors including the surface error and thickness variation of a hemispherical shell are determinant of the system performance, e.g. the frequency splitting of a hemispherical resonator gyroscope. Therefore, complete characterization at 0.1 µm…
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Keywords:
stitching interferometric;
hemispherical shells;
geometric errors;
interferometric characterization ... See more keywords