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Published in 2020 at "Measurement"
DOI: 10.1016/j.measurement.2020.107626
Abstract: Abstract Uncertainty evaluation is one of the most important concepts in metrological characterizations. This paper proposes a method for uncertainty evaluation of measurements of cylindrical surfaces by means of stitching interferometry. The proposed method is…
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Keywords:
stitching interferometry;
uncertainty evaluation;
surface;
uncertainty ... See more keywords
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Published in 2020 at "Optics and Lasers in Engineering"
DOI: 10.1016/j.optlaseng.2019.105795
Abstract: Abstract With the fast development of diffraction-limited storage rings and free electron lasers, the requirement for ultimate quality X-ray mirror is getting higher and the mirror surface needs to approach the sub-nm root mean square…
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Keywords:
stitching interferometry;
mirror;
synchrotron;
ray mirror ... See more keywords
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Published in 2017 at "Measurement Science and Technology"
DOI: 10.1088/1361-6501/aa6f8d
Abstract: Traditional stitching interferometry requires finding out the overlap correspondence and computing the discrepancies in the overlap regions, which makes it complex and time-consuming to obtain the 360° form map of a cylinder. In this paper,…
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Keywords:
stitching interferometry;
interferometry;
cylinder without;
full cylinder ... See more keywords
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Published in 2018 at "Optics express"
DOI: 10.1364/oe.26.023278
Abstract: In this paper, a two-dimensional stitching interferometry system using two tiltmeters is proposed. During the scanning and the measurement, one tiltmeter stays with the interferometer and the other one is attached to the translation stage…
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Keywords:
stitching interferometry;
dimensional stitching;
surface;
two dimensional ... See more keywords