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Published in 2025 at "Materials"
DOI: 10.3390/ma18081687
Abstract: Magnetron sputtering allows for the accurate estimation of film thickness. Strontium titanate (STO) thin films were deposited on Nb-doped STO substrates using radiofrequency magnetron sputtering technology. The microstructures and dielectric properties of STO thin films…
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Keywords:
capacitance;
sto thin;
capacitance density;
strontium ... See more keywords