Spectroscopic Ellipsometry Characterization of As-Deposited and Annealed Non-Stoichiometric Indium Zinc Tin Oxide Thin Film
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DOI: 10.3390/ma14030578
Abstract: A spectroscopic ellipsometry study on as-deposited and annealed non-stoichiometric indium zinc tin oxide thin films of four different compositions prepared by RF magnetron sputtering was conducted. Multi-sample analysis with two sets of samples sputtered onto… read more here.
Keywords: ellipsometry; spectroscopic ellipsometry; non stoichiometric; deposited annealed ... See more keywords