Articles with "stoichiometric silicon" as a keyword



Two-octave spanning supercontinuum generation in stoichiometric silicon nitride waveguides pumped at telecom wavelengths.

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Published in 2017 at "Optics express"

DOI: 10.1364/oe.25.001542

Abstract: We demonstrate supercontinuum generation in stoichiometric silicon nitride (Si3N4 in SiO2) integrated optical waveguides, pumped at telecommunication wavelengths. The pump laser is a mode-locked erbium fiber laser at a wavelength of 1.56 µm with a… read more here.

Keywords: silicon nitride; supercontinuum generation; waveguides pumped; generation stoichiometric ... See more keywords

Thick waveguides of low-stress stoichiometric silicon nitride on sapphire (SiNOS).

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Published in 2024 at "Optics express"

DOI: 10.1364/oe.536578

Abstract: Low-stress stoichiometric silicon nitride (Si3N4) waveguides with an unprecedented thickness of up to 1350 nm and a width in the range of 2.2 - 2.7 µm are fabricated using a single LPCVD step on sapphire… read more here.

Keywords: stoichiometric silicon; stress stoichiometric; low stress; thick waveguides ... See more keywords