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Published in 2017 at "Optics express"
DOI: 10.1364/oe.25.001542
Abstract: We demonstrate supercontinuum generation in stoichiometric silicon nitride (Si3N4 in SiO2) integrated optical waveguides, pumped at telecommunication wavelengths. The pump laser is a mode-locked erbium fiber laser at a wavelength of 1.56 µm with a…
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Keywords:
silicon nitride;
supercontinuum generation;
waveguides pumped;
generation stoichiometric ... See more keywords
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Published in 2024 at "Optics express"
DOI: 10.1364/oe.536578
Abstract: Low-stress stoichiometric silicon nitride (Si3N4) waveguides with an unprecedented thickness of up to 1350 nm and a width in the range of 2.2 - 2.7 µm are fabricated using a single LPCVD step on sapphire…
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Keywords:
stoichiometric silicon;
stress stoichiometric;
low stress;
thick waveguides ... See more keywords