Mechanical stop mechanism for overcoming MEMS fabrication tolerances
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DOI: 10.1088/0960-1317/27/1/017001
Abstract: A mechanical stop mechanism is developed in order to compensate MEMS fabrication tolerances in discrete positioning. The mechanical stop mechanism is designed to be implemented on SOI wafers using a common DRIE etching process. The… read more here.
Keywords: fabrication tolerances; stop mechanism; mechanical stop; mechanism ... See more keywords