Exploring Strategies to Contact 3D Nano-Pillars
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DOI: 10.3390/nano10040716
Abstract: This contribution explores different strategies to electrically contact vertical pillars with diameters less than 100 nm. Two process strategies have been defined, the first based on Atomic Force Microscope (AFM) indentation and the second based… read more here.
Keywords: nano pillars; exploring strategies; strategies contact; contact nano ... See more keywords