Tensile strength of Silicon Nanowires batch-fabricated into electrostatic MEMS testing device
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DOI: 10.3390/app8060880
Abstract: The tensile strength of a silicon nanowire (SiNW) that had been integrated into a silicon-on-insulator (SOI)-based microelectromechanical system (MEMS) device was measured using electrostatic actuation and sensing. SiNWs of about 150 nm diameter and 5… read more here.
Keywords: tensile strength; batch fabricated; strength silicon; silicon ... See more keywords