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Published in 2020 at "IEEE Transactions on Electron Devices"
DOI: 10.1109/ted.2020.2982667
Abstract: RF MEMS switches are well known to exhibit performance superior to solid-state devices. However, electromechanical issues, such as repeatability and higher pull-in voltage, are a matter of concern. MEMS switches generally consist of metallic beams…
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Keywords:
voltage;
pull voltage;
spdt switch;
stress pull ... See more keywords