Microstructure and mechanical properties of stress-tailored piezoelectric AlN thin films for electro-acoustic devices
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DOI: 10.1016/j.apsusc.2017.02.147
Abstract: Abstract Nanoindentation measurements along with atomic force microscopy, X-ray diffraction, and residual stress analyses on the basis of Raman measurements have been performed to characterize stress-tailored AlN thin films grown using reactive RF magnetron sputtering.… read more here.
Keywords: stress tailored; thin films; aln thin; stress ... See more keywords