Correlation of residual stress variations to electrical properties changes in ZNO thin films
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DOI: 10.1007/s10854-017-7334-3
Abstract: Using Nd:YAG pulsed laser deposition, the modulation of the residual stress in thin films of ZnO and their effect on the electrical properties was studied. The variations of residual stress were correlated with the number… read more here.
Keywords: thin films; correlation residual; stress variations; residual stress ... See more keywords