Review Paper: Residual Stresses in Deposited Thin-Film Material Layers for Micro- and Nano-Systems Manufacturing
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DOI: 10.3390/mi13122084
Abstract: This review paper covers a topic of significant importance in micro- and nano-systems development and manufacturing, specifically the residual stresses in deposited thin-film material layers and methods to control or mitigate their impact on device… read more here.
Keywords: stresses deposited; deposited thin; residual stresses; material ... See more keywords