Articles with "stroke nanopositioning" as a keyword



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Design of a Long Stroke Nanopositioning Stage With Self-Damping Actuator and Flexure Guide

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Published in 2022 at "IEEE Transactions on Industrial Electronics"

DOI: 10.1109/tie.2021.3126981

Abstract: Long stroke nanopositioning stages with high natural frequency and compact size are demanded in precision engineering. However, in previous researches, the natural frequency of the long stroke nanopositioning stage is normally below 50 Hz because… read more here.

Keywords: flexure guide; nanopositioning stage; long stroke; stage ... See more keywords