Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement
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DOI: 10.1016/j.sse.2017.09.012
Abstract: Abstract This paper presents a novel structural piezoresistive pressure sensor with a four-beams-bossed-membrane (FBBM) structure that consisted of four short beams and a central mass to measure micro-pressure. The proposed structure can alleviate the contradiction… read more here.
Keywords: micro pressure; structural piezoresistive; novel structural; piezoresistive pressure ... See more keywords