The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatings
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DOI: 10.1134/s1063785020070238
Abstract: Abstract Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings of Zr 75 Pd 25 composition were obtained with an average deposition rate of 1.3 nm/s at a substrate temperature of 40°C, while… read more here.
Keywords: sputtering conditions; influence magnetron; structure coatings; magnetron ... See more keywords