A Multilayered Structure for Packageless Acoustic- Wave Devices With Ultra-Small Sizes
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DOI: 10.1109/jmems.2021.3074385
Abstract: An increasing demand for surface acoustic wave filters with high performances contributes to the necessity of reducing sizes and costs. The present work proposes a multilayered structure of high-velocity layer/SiO2/interdigital transducers (IDTs)/piezoelectric-single-crystal substrate to further… read more here.
Keywords: sub sub; sub; structure; structure packageless ... See more keywords