A numerical study of ultraprecision machining of monocrystalline silicon with laser nano-structured diamond tools by atomistic simulation
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DOI: 10.1016/j.apsusc.2016.10.014
Abstract: Abstract Three-dimension molecular dynamics (MD) simulations is employed to investigate the ultraprecision machining of single crystal silicon with structured nanoscale diamond tool fabricated by laser. The advantages and disadvantages of diamond machining using structured tools… read more here.
Keywords: ultraprecision machining; tool; stress; diamond ... See more keywords