Optical properties of black silicon structures ALD-coated with Al2O3
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DOI: 10.1088/1361-6528/ac9419
Abstract: Atomic layer deposited (ALD) Al2O3 coatings were applied on black silicon (b-Si) structures. The coated nanostructures were investigated regarding their reflective and transmissive behaviour. For a systematic study of the influence of the Al2O3 coating,… read more here.
Keywords: properties black; black silicon; silicon structures; optical properties ... See more keywords