Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review
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DOI: 10.3390/mi14040847
Abstract: In recent years, Micro-Electro-Mechanical Systems (MEMS) technology has had an impressive impact in the field of acoustic transducers, allowing the development of smart, low-cost, and compact audio systems that are employed in a wide variety… read more here.
Keywords: recent trends; trends structures; transducers audio; structures interfaces ... See more keywords