Optimization of structures of DC RF MEMS series switches for low actuation
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DOI: 10.1007/s00542-016-3063-4
Abstract: This paper presents the design and simulation of low actuation DC RF MEMS ohmic series switches. The proposed switches are suitable for applications to be used in the frequency range from DC to 10 GHz. Therefore… read more here.
Keywords: structures mems; low actuation; series; optimization structures ... See more keywords
Processing of GaN/Si(111) Epitaxial Structures for MEMS Applications
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DOI: 10.1134/s1063782618160297
Abstract: Two different approaches for the etching of the gallium nitride epitaxial layers grown on Si(111) substrates by plasma-assisted molecular beam epitaxy have been elaborated. It is demonstrated that anisotropic etch profiles can be achieved by… read more here.
Keywords: epitaxial structures; 111 epitaxial; chemical etching; structures mems ... See more keywords