Structuring of Si into Multiple Scales by Metal-Assisted Chemical Etching.
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DOI: 10.1002/adma.202005932
Abstract: Structuring Si, ranging from nanoscale to macroscale feature dimensions, is essential for many applications. Metal-assisted chemical etching (MaCE) has been developed as a simple, low-cost, and scalable method to produce structures across widely different dimensions.… read more here.
Keywords: metal assisted; mace; structuring multiple; chemical etching ... See more keywords