Optical and XPS studies of BCN thin films by co-sputtering of B4C and BN targets
Sign Up to like & getrecommendations! Published in 2017 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2016.10.180
Abstract: Abstract Boron carbon nitride (BCN) thin films are investigated for their optical properties. BCN, is the unanimous choice for inter-dielectric layer (IDL) in very large scale integration (VLSI) because of its low-k dielectric constant. Optical… read more here.
Keywords: thin films; xps studies; films sputtering; bcn thin ... See more keywords