Capacitance–Voltage Studies on Electrostatically Actuated MEMS Micromirror Arrays
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DOI: 10.3390/mi16020157
Abstract: This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters,… read more here.
Keywords: studies electrostatically; capacitance voltage; voltage studies; micromirror arrays ... See more keywords