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Published in 2018 at "Journal of Applied Physics"
DOI: 10.1063/1.5017857
Abstract: Plasma properties of magnetrons have been extensively studied in the past with the focus on small, research-style magnetrons with planar disk targets. In this contribution, we report on plasma diagnostics of a linear magnetron because…
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Keywords:
studies linear;
plasma studies;
magnetron operating;
linear magnetron ... See more keywords
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Published in 2018 at "Journal of Applied Crystallography"
DOI: 10.1107/s160057671801419x
Abstract: This article describes complete characterization of the polygonal dislocation half-loops (PDHLs) introduced by scratching and subsequent bending of an Si(111) crystal. The study is based on the X-ray topo-tomography technique using both a conventional laboratory…
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Keywords:
topo tomography;
linear dislocations;
ray topo;
studies linear ... See more keywords