Study of Ti contacts to corundum α-Ga2O3
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DOI: 10.1088/1361-6463/ac0d28
Abstract: We present a study of the electrical, structural and chemical properties of Ti contacts on atomic layer deposited α-Ga2O3 film. Ti forms an ohmic contact with α-Ga2O3. The contact performance is highly dependent on the… read more here.
Keywords: ga2o3; study contacts; study; physics ... See more keywords