Structural study of NiOx thin films fabricated by radio frequency sputtering at low temperature
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DOI: 10.1016/j.tsf.2017.12.003
Abstract: Abstract Structure and crystal growth of nickel oxide thin films (10–300 nm) prepared by low-temperature sputtering have been investigated by scanning electron microscopy (SEM), X-ray diffraction, and spectroscopic ellipsometry. Very thin films are compact and homogeneous… read more here.
Keywords: niox thin; low temperature; thin films; study niox ... See more keywords