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Published in 2019 at "Vacuum"
DOI: 10.1016/j.vacuum.2018.10.060
Abstract: Abstract Ag+-ion implantation of single-crystal c-Si at low-energy (E = 30 keV) high-doses (D = 1.25⋅1015–1.5⋅1017 ion/cm2) and current density (J = 2, 8, 15 μA/cm2) was carried out. The changes of Si surface morphology after ion implantation were studied by scanning electron…
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Keywords:
surface;
ion;
study silicon;
ion cm2 ... See more keywords
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Published in 2018 at "Journal of Instrumentation"
DOI: 10.1088/1748-0221/13/01/p01019
Abstract: Silicon detectors irradiated by 40Ar ions with the energy of 1.62 GeV were studied with the goal to find the parameters of radiation damage induced by ions. The measurements of the I–V characteristics, temperature dependences…
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Keywords:
silicon detector;
irradiation;
study silicon;
detector degradation ... See more keywords