Articles with "sub equivalent" as a keyword



Photo from wikipedia

Sub-1 nm Equivalent Oxide Thickness Al-HfO2 Trapping Layer with Excellent Thermal Stability and Retention for Nonvolatile Memory

Sign Up to like & get
recommendations!
Published in 2018 at "ACS Applied Nano Materials"

DOI: 10.1021/acsanm.8b00918

Abstract: Memory stacks for charge trapping cells have been produced exploiting Al-doped HfO2, Al2O3, and SiO2 made by atomic layer deposition. The fabricated stacks show superior stability and electrical ch... read more here.

Keywords: oxide thickness; equivalent oxide; sub equivalent; hfo2 ... See more keywords