Nano- and submicro-sized three-dimensional shape measuring system using a SAW-based capacitance sensor
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DOI: 10.1007/s12206-018-0908-z
Abstract: SAW-based capacitance sensors were developed by measuring the changes in the voltage ratio between an output inter-digital transducer (IDT) and an input IDT, induced by the variation in the capacitance between hemi-spherical conductive tips with… read more here.
Keywords: system; submicro sized; based capacitance; saw based ... See more keywords