Influence of substrate bias on structural and tribo-mechanical properties of pulsed magnetron sputtered TiN-WSx hard-lubricious coating
Sign Up to like & getrecommendations! Published in 2018 at "Tribology International"
DOI: 10.1016/j.triboint.2018.03.005
Abstract: Abstract Lubricious WS x was codeposited with hard TiN to improve tribological property of the latter. Effects of substrate bias on structural and tribo-mechanical properties of composite coatings were investigated. Tribologically favourable (002) orientation of… read more here.
Keywords: tribo mechanical; structural tribo; bias structural; mechanical properties ... See more keywords
Effect of substrate bias on the growth behavior of iridium on A-plane sapphire using radio frequency sputtering at low temperatures
Sign Up to like & getrecommendations! Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.01.032
Abstract: Abstract We present results on the investigation of the substrate bias effect on the growth behavior of iridium films deposited on A-plane sapphire by radio frequency (rf) sputtering at low substrate temperatures. Films deposited without… read more here.
Keywords: growth behavior; effect; substrate bias; substrate ... See more keywords
Enhanced power coupling efficiency in inductive discharges with RF substrate bias driven at consecutive harmonics with adjustable phase
Sign Up to like & getrecommendations! Published in 2017 at "Applied Physics Letters"
DOI: 10.1063/1.5000144
Abstract: Inductive discharges with radio-frequency (RF) substrate bias are frequently used for various technological applications. We operate such a hybrid discharge with a phase-locked RF substrate bias at twice the frequency of the inductive coupling with… read more here.
Keywords: phase; adjustable phase; inductive discharges; power coupling ... See more keywords
Deposition of High-k Tantalum Oxide by DC Hollow Cathode Gas Flow Sputtering and the Influence of DC and Pulsed DC Substrate Bias
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Journal of the Electron Devices Society"
DOI: 10.1109/jeds.2025.3624015
Abstract: This work investigates the capability of direct current (DC) excited hollow cathode gas flow sputtering (GFS) to contribute to the synthesis of high performing thin films for micro electronic applications. Therefore, high-k tantalum oxide (TaOx)… read more here.
Keywords: cathode gas; hollow cathode; gas flow; substrate bias ... See more keywords
Chemical Ordering of Sputtered FePt/h-BN Granular Media Using RF Substrate Bias
Sign Up to like & getrecommendations! Published in 2025 at "IEEE Transactions on Magnetics"
DOI: 10.1109/tmag.2025.3528734
Abstract: Recently hexagonal-BN (h-BN)/L $1_{0}$ -FePt granular media has been proposed as an ideal candidate for next generation heat assisted magnetic recording (HAMR) media. The formation of crystalline h-BN at the FePt grain boundaries has resulted… read more here.
Keywords: granular media; fept granular; substrate bias; bias ... See more keywords
Subthreshold Characteristic Analysis and Models for Tri-Gate SOI MOSFETs Using Substrate Bias Induced Effects
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Transactions on Nanotechnology"
DOI: 10.1109/tnano.2019.2906567
Abstract: This paper proposes the substrate bias voltage dependent subthreshold models of channel potential, threshold voltage, current, drain induced barrier lowering, and subthreshold swing for tri-gate silicon-on-insulator (SOI) MOSFETs (TG-MOSFETs). The substrate induced surface potential effect… read more here.
Keywords: soi mosfets; subthreshold characteristic; tri gate; substrate bias ... See more keywords
Effect of Substrate Bias Voltage and Ti Doping on the Tribological Properties of DC Magnetron Sputtered MoSx Coatings
Sign Up to like & getrecommendations! Published in 2019 at "Iranian Journal of Materials Science and Engineering"
DOI: 10.22068/ijmse.16.2.10
Abstract: Molybdenum disul de (MoS2) is one of the most widely used solid lubricants. In this work, composite MoS x /Ti coatings were deposited by direct-current magnetron sputter ion plating onto plain carbon steel substrates. The… read more here.
Keywords: voltage doping; effect substrate; tribological properties; bias voltage ... See more keywords
Substrate Bias-Driven Structural and Mechanical Evolution of AlCrN and AlCrSiN Coatings via Reactive Magnetron Sputtering
Sign Up to like & getrecommendations! Published in 2025 at "Materials"
DOI: 10.3390/ma18071671
Abstract: AlCrN and AlCrSiN coatings were deposited via reactive magnetron sputtering. This study investigates the effects of radio frequency (RF) substrate bias, ranging from 0 V to 200 V, on the chemical composition, microstructure, and mechanical… read more here.
Keywords: via reactive; alcrsin coatings; reactive magnetron; alcrn alcrsin ... See more keywords
EFFECT OF PULSED SUBSTRATE BIAS ON THE STRUCTURE AND PROPERTIES OF NITRIDE COATINGS DEPOSITED BY FILTERED CATHODIC ARC PLASMA
Sign Up to like & getrecommendations! Published in 2024 at "Problems of Atomic Science and Technology"
DOI: 10.46813/2024-149-176
Abstract: The results of studies of nitride coatings deposited using a cathodic vacuum arc plasma source with a rectilinear type filter are presented. The effect of parameters of high voltage substrate bias pulses on the deposition… read more here.
Keywords: coatings deposited; structure; arc plasma; bias ... See more keywords