Nanoantennas and metasurfaces tailored by electron beam lithography and substrate conductivity
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DOI: 10.1038/s41598-025-12996-3
Abstract: The precision and reproducibility in the fabrication of periodic nanoantenna arrays are crucial for metasurfaces to achieve consistent and controllable optical responses, and electron beam lithography (EBL) enables this by providing patterning with high resolution… read more here.
Keywords: electron beam; beam lithography; substrate conductivity; conductivity ... See more keywords
The influence of a silicon substrate conductivity type on the efficiency of photostimulated polyelectrolyte adsorption
Sign Up to like & getrecommendations! Published in 2017 at "Technical Physics Letters"
DOI: 10.1134/s1063785017040290
Abstract: Changes in the work function of silicon substrates of different conductivity types under illumination and after deposition of a polyethylenimine layer by the method of photostimulated adsorption were examined. It is revealed that photostimulated adsorption… read more here.
Keywords: adsorption; substrate conductivity; silicon; silicon substrate ... See more keywords