Influence of Substrate Stage Temperature and Rotation Rate on the Magneto-Optical Quality of RF-Sputtered Bi2.1Dy0.9Fe3.9Ga1.1O12 Garnet Thin Films
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DOI: 10.3390/app8030456
Abstract: Highly bismuth-substituted iron garnet thin films are prepared on quartz substrates by using a radio frequency (RF) magnetron sputtering technique. We study the factors (process parameters associated with the RF magnetron sputter deposition technique) affecting… read more here.
Keywords: rotation rate; thin films; substrate stage; rotation ... See more keywords