Oblique angle deposition of boron carbide films by magnetron sputtering
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DOI: 10.1063/5.0056849
Abstract: Many applications of boron carbide ( B4C) films entail deposition on non-planar substrates, necessitating a better understanding of oblique angle deposition phenomena. Here, we systematically study the effect of substrate tilt on properties of B4C… read more here.
Keywords: boron carbide; magnetron sputtering; angle deposition; deposition ... See more keywords