Effect of different substrates on Si and Ta co-doped Ga2O3 films prepared by pulsed laser deposition
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DOI: 10.1016/j.jcrysgro.2019.125455
Abstract: Abstract In this study, the structure, morphology, electrical and optical properties of Si and Ta co-doped gallium oxide (Ga2O3) films deposited on (1 0 0) Ga2O3, (0 0 0 1) sapphire and quartz substrates by pulsed laser deposition are analyzed.… read more here.
Keywords: laser deposition; ga2o3 films; doped ga2o3; substrates doped ... See more keywords