Structural characteristics of m-plane AlN substrates and homoepitaxial films
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DOI: 10.1016/j.jcrysgro.2018.07.012
Abstract: Abstract Homoepitaxial non-polar AlN films were realized on m-plane ( 10 1 - 0 ) -oriented AlN single crystals by metalorganic chemical vapor deposition (MOCVD). The microstructural properties of m-plane AlN substrates and homoepitaxial films… read more here.
Keywords: plane; growth; homoepitaxial films; substrates homoepitaxial ... See more keywords